Lab: UCLA NanoFabrication Laboratory
Equipment: JEOL JSM-6610 EBeam
New Users: Please click here to request an account in order to reserve equipment.
Existing Users: Please click here to login.
March 21, 2018
| ||
| Wednesday | ||
| 0:00 | ||
| 1:00 | ||
| 2:00 | ||
| 3:00 | ||
| 4:00 | ||
| 5:00 | ||
| 6:00 | ||
| 7:00 | ||
| 8:00 | ||
| 9:00 | ||
| 10:00 | ||
| 11:00 | ||
| 12:00 | ||
| 13:00 |
| |
| 14:00 | ||
| 15:00 | ||
| 16:00 | ||
| 17:00 | ||
| 18:00 | ||
| 19:00 | ||
| 20:00 | ||
| 21:00 | ||
| 22:00 | ||
| 23:00 | ||
| 24:00 | ||
cc
Equipment Color
| JEOL JSM-6610 EBeam UCLA NanoFabrication Laboratory |
| Quantity: 1 Usage Type: Essential |
| Training Required: Yes Training Level: 1 Training Service Type: aid/trainer required Approval Required: Yes Service Type: self-service |
| Description: JEOL JSM-6610 is general-purpose, thermal type SEM to meet the needs of a wide range of users, as standard recipes simplify the setting procedures. The standard 5-axis motor stage makes it easy to locate the area of interest. Combined with Nanometer Pattern Generation System (NPGS) for direct write electron beam lithography, the JSM-6610 offers a seamless transition between imaging and analysis. |