Aydogan Ozcan, Faculty Director
Adam Stieg, Interim Technical Director
The CNSI Integrated Systems Nanofabrication Cleanroom (ISNC) consists of 8,900
square feet of vertical-flow clean room space and 680 square feet of class 10,000 support
space. The clean room is divided into 12 class 100 and class 1000 process bays, 2 of
which form a biology suite with its own dedicated air flow system.
The latest advances in vibration isolation and electromagnetic shielding are integrated
into the clean space to allow installation of the most sensitive and demanding fabrication
and analysis equipment.
The CNSI approach is unique in that it will integrate classic semiconductor tools and
processes with biological, chemical, and medical substrates.
The ISNC will also be able to process more traditional nano-device fabrication such as
quantum dots, single electron transistors, nanotips etc.
The diversity of process capability makes this a unique laboratory.
Please visit the Integrated Systems Nanofabrication Cleanroom