Integrated Systems Nanofabrication Cleanroom (ISNC)

Kang Wang, Faculty Director
Steve Franz, Technical Director

The CNSI Integrated Systems Nanofabrication Cleanroom (ISNC) consists of 8,900 square feet of vertical-flow clean room space and 680 square feet of class 10,000 support space. The clean room is divided into 12 class 100 and class 1000 process bays, 2 of which form a biology suite with its own dedicated air flow system.

The latest advances in vibration isolation and electromagnetic shielding are integrated into the clean space to allow installation of the most sensitive and demanding fabrication and analysis equipment.

The CNSI approach is unique in that it will integrate classic semiconductor tools and processes with biological, chemical, and medical substrates. The ISNC will also be able to process more traditional nano-device fabrication such as quantum dots, single electron transistors, nanotips etc.

The diversity of process capability will make this a very unique laboratory.

Completion of the Integrated Systems Nanofabrication Cleanroom (ISNC) at CNSI is planned for 2009.

Please visit the Nanoelectronics Research Facility (NRF or Nanolab) at UCLA