JSM-6610 SEM, Room B200Electron Imaging Center for Nanosystems (EICN)
Quantity: 1
Usage Type: Essential
Training Required: Yes
Training Level: 1
Training Service Type: self-service
Approval Required: Yes
Service Type: self-service
Description:
The JEOL JSM-6610 SEM is an analytical Scanning Electron Microscope capable of achieving 3nm point-to-point resolution at an accelerating voltage of 30kV. It is equipped with a tungsten filament, and a large imaging chamber for observation of specimens ranging from small pieces up to 200mm in diameter.
With Nanometer Pattern Generation System (NPGS) software, the system is capable of Electron Beam Lithography.
Key features:
Model: JEOL JSM-6610 SEM
Large sample size: up to 200 mm diameter and 80 mm height
Instructions to become a user can be found here: EICN Become a User. Training can be requested by emailing eicnhelp@cnsi.ucla.edu. If you do not receive a reply within 48 hours, you can email Matthew Mecklenburg (mmecklenburg@cnsi.ucla.edu) to follow up.
Reservation Details - Today's Date/Time: Jun 30 2024, 04:57 pm