Lab: UCLA NanoFabrication Laboratory
Equipment: JEOL JSM-6610 EBeam
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Equipment Color
| JEOL JSM-6610 EBeam UCLA NanoFabrication Laboratory |
| Quantity: 1 Usage Type: Essential |
| Training Required: Yes Training Level: 1 Training Service Type: aid/trainer required Approval Required: Yes Service Type: self-service |
| Description: JEOL JSM-6610 is general-purpose, thermal type SEM to meet the needs of a wide range of users, as standard recipes simplify the setting procedures. The standard 5-axis motor stage makes it easy to locate the area of interest. Combined with Nanometer Pattern Generation System (NPGS) for direct write electron beam lithography, the JSM-6610 offers a seamless transition between imaging and analysis. |