Lab: Electron Imaging Center for NanoMachines (EICN)
Equipment: JSM-6610 SEM, Room B200
|JSM-6610 SEM, Room B200 Electron Imaging Center for NanoMachines (EICN)|
|Quantity: 1 Usage Type: Essential|
|Training Required: Yes Training Level: 1 Training Service Type: self-service Approval Required: Yes Service Type: self-service|
The JEOL JSM-6610 SEM is an analytical Scanning Electron Microscope capable of achieving 3nm point-to-point resolution at an accelerating voltage of 30kV. It is equipped with a tungsten filament, and a large imaging chamber for observation of specimens ranging from small pieces up to 200mm in diameter.
With Nanometer Pattern Generation System (NPGS) software, the system is capable of Electron Beam Lithography.