CNSI Core Lab Management System
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Lab: Electron Imaging Center for Nanosystems (EICN)
Equipment: JSM-6610 SEM, Room B200

New Users:  Please click here to request an account in order to reserve equipment.
Existing Users:  Please click here to login.

November 21, 2024
 Thursday
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Equipment Color
JSM-6610 SEM, Room B200     Electron Imaging Center for Nanosystems (EICN)
Quantity: 1     Usage Type: Essential    
Training Required: Yes     Training Level: 1     Training Service Type: self-service     Approval Required: Yes     Service Type: self-service
Description:

The JEOL JSM-6610 SEM is an analytical Scanning Electron Microscope capable of achieving 3nm point-to-point resolution at an accelerating voltage of 30kV. It is equipped with a tungsten filament, and a large imaging chamber for observation of specimens ranging from small pieces up to 200mm in diameter.

With Nanometer Pattern Generation System (NPGS) software, the system is capable of Electron Beam Lithography.

Key features:

  • Model: JEOL JSM-6610 SEM
  • Large sample size: up to 200 mm diameter and 80 mm height
  • Everhart-Thornley detector: 3.0 nm (30 kV), 15 nm (1 kV)
  • Magnification: 5x to 300,000x
  • Accelerating voltage: 1 kV to 30 kV
  • Filament: Tungsten hairpin
  • Equipped with Nanometer Pattern
  • Generation System (NPGS) for Electron
  • Beam Lithography

    • Rates: Internal Academic rate: $50/hour; External Academic rate: $70/hour; Industry rate: $100/hour

    Instructions to become a user can be found here: EICN Become a User. Training can be requested by emailing eicnhelp@cnsi.ucla.edu. If you do not receive a reply within 48 hours, you can email Matthew Mecklenburg (mmecklenburg@cnsi.ucla.edu) to follow up.

    Reservation Details  -  Today's Date/Time: Nov 21 2024, 01:45 am
    To make a reservation on this Equipment:
    • New Users:   Click here to ask for authorization.
    • Existing Users:   Click here to ask for authorization.