Lab: UCLA NanoFabrication Laboratory
Equipment: JEOL JSM-6610 EBeam

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March 2018
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4	5	6	7	8	9 JEOL JSM-6610 EBeam (02:30 pm-05:00 pm)	10
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18	19	20 JEOL JSM-6610 EBeam (03:00 pm-04:00 pm) JEOL JSM-6610 EBeam (04:00 pm-05:00 pm)	21 JEOL JSM-6610 EBeam (01:00 pm-03:00 pm)	22	23	24
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Equipment Reservation Policy

JEOL JSM-6610 EBeam:

User can cancel (N/A) prior to reservation and (N/A) after reservation date and time. How far a reservation in the future could be made: (N/A) from Current Date.

JEOL JSM-6610 EBeam     UCLA NanoFabrication Laboratory

Quantity: 1     Usage Type: Essential

Training Required: Yes     Training Level: 1     Training Service Type: aid/trainer required     Approval Required: Yes     Service Type: self-service

Description: JEOL JSM-6610 is general-purpose, thermal type SEM to meet the needs of a wide range of users, as standard recipes simplify the setting procedures. The standard 5-axis motor stage makes it easy to locate the area of interest. Combined with Nanometer Pattern Generation System (NPGS) for direct write electron beam lithography, the JSM-6610 offers a seamless transition between imaging and analysis.

Reservation Details  -  Today's Date/Time: May 03 2024, 05:21 am

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